집적회로공정 5강 - 반도체 공학기초
1. Sheet resistance (Rs) 2. Local oxidation of silicon (LOCOS)
집적회로공정 6강 - Isolation과 contact issue
1. Isolation methods 2. Contacts 3. Process flow of MOSFETs
집적회로공정 7강 - Isolation methods
1. Local oxidation of silicon (LOCOS) 2. Shallow trench isolation (STI) 3. Thermal oxidation
집적회로공정 8강 - Oxidation
1. Thermal oxidation 2. Properties of thermal SiO2 3. Modeling of thermal oxidation
집적회로공정 9강 - Oxidation
1. Modeling of thermal oxidation 2. Effect of impurities 3. Dopant redistribution