집적회로공정 8강 - Oxidation

1. Thermal oxidation 2. Properties of thermal SiO2 3. Modeling of thermal oxidation

집적회로공정 9강 - Oxidation

1. Modeling of thermal oxidation 2. Effect of impurities 3. Dopant redistribution

집적회로공정 10강 - Oxidation

Oxide charges

집적회로공정 11강 - Oxidation

1. Oxidation recipe 2. Oxidation source/method

집적회로공정 12강 - Ion implantation

1. Ion implantation 2. Concentration and dose 3. Energy loss mechanism