집적회로공정 15강 - Diffusion

1. Dopant diffusion 2. Diffusion mechanisms in Si 3. Diffusion process modeling

집적회로공정 16강 - Diffusion

1. High concentration diffusion effect 2. Oxidation enhanced diffusion (OED) 3. Sheet resistance

집적회로공정 17강 - Gate stack

1. Gate leakage current 2. Tunneling mechanisms 3. Evaluation of gate dielectric thickness 4. Equivalent oxide thickness (EOT) 5. High-k gate dielectric

집적회로공정 18강 - Gate stack

1. Gate leakage current 2. Tunneling mechanisms 3. Evaluation of gate dielectric thickness 4. Equivalent oxide thickness (EOT) 5. High-k gate dielectric.

집적회로공정 19강 - Photolithography

1. Photolithography 2. Photomask layout 3. Photoresist / lift-off 4. Theory of photolithography